The semiconductors that form an integral part of modern life require extremely precise and clean manufacturing environment. Among the sensors that can ensure proper processing is an airborne particle sensor. With CyberOptics Airborne Particle Sensor (APS2), semiconductor manufacturers can improve equipment set-up and long-term yields in their fabs by wirelessly monitoring airborne particles in real-time.
With the APS2, semiconductor manufacturers can easily monitor, identify and enable troubleshooting of airborne particles down to 0.14µm within their process equipment and automated material handling systems. The sensor identifies when and where the particles originate and speeds equipment qualification with wireless measurements. The APS2 is used with the company’s ParticleView software for real-time equipment diagnostics.
For more information, click here.
Filed Under: Sensor Tips