Leading edge manufacturing, such as that in the semiconductor and data
storage industries, demands positioning tolerances beyond the capability of
conventional ball-screw and mechanical-bearing positioning systems. The
ABL1500, with its fully active preload, exceptionally high stiffness, and
excellent geometric characteristics, was designed specifically to meet the
needs of the most demanding applications.
Air-Bearing Design for High Dynamic Performance
The ABL1500 incorporates an
active preload on both the vertical and horizontal surfaces, and the
opposing thin-film pressure maintains the bearing nominal gap tolerance.
This design, in addition to the large air-bearing surface that distributes
the load over a large surface area, results in a stage with outstanding
stiffness that is ideal for heavy or offset loading. Proprietary
manufacturing techniques result in unsurpassed geometrical characteristics.
The air bearing has an inherent averaging effect that maximizes performance.
The thin film will fill small surface voids and allow for other
irregularities. This characteristic yields superior pitch, roll, yaw,
straightness, and flatness specifications.
Linear Motor Drive
The driving force behind the ABL1500 is Aerotech's BLMC series brushless
linear servomotor. Aerotech's long history and experience as a motor
manufacturer is reflected in this design. The BLMC uses an ironless forcer
for zero cogging and no attractive forces, resulting in unsurpassed
smoothness of motion. The BLMC generates both high force and high velocity,
making it the perfect combination of power and performance.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear motor drive, and
noncontact feedback device ensure years of maintenance-free operation at the
high performance levels that are expected of Aerotech equipment. Because
there is no mechanical contact between moving elements, the ABL1500
experiences no wear or reduction in performance over time. Service life is
virtually unlimited and since there is no lubrication – only clean, dry gas
– air bearings are ideal for cleanroom and medical applications.
Cable Management System (CMS)
We carefully optimize the cable bend radius to ensure years of trouble-free
operation. In the unlikely event of failure, Aerotech's modular design makes
cable replacement quick and easy with minimal downtime. We include all
customer-required cables, air hoses, etc. in our CMS bundle to facilitate
integration into the final system. Both ends are fully connectorized for
simple integration into the customer's machine.
ABL1500 Series Linear Air-Bearing Stage for High-Performance Scanning and Inspection Applications
- Designed for high-performance scanning and inspection
- Active air preload on all air-bearing surfaces
- Linear encoder feedback provides sub-nanometer resolution
- High stiffness for heavy loads and excellent geometrical performance
- Travel up to 500 mm
:: Design World ::
Filed Under: Semiconductor, Encoders • linear, Motion control • motor controls, Stages • gantries
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