This BLDC motor meets the high speed requirements for a Turbomolecular Vacuum Pump application. The Turbomolecular pump is used in the semiconductor device manufacturing process, which requires highly compressed gases for chemical deposition and implantation.
The pump incorporates the specially designed motor driven turbine rotor, which is capable of operating speeds of up to 70,000 rpm. The extremely high speeds are essential to achieve vacuum pressures down to one micropascal. This Frameless Permanent Magnet BLDC Motor (Model # DIP14-14-000A) measures 1.4 in. in diameter x 1.4 in. in axial length. The Rotor/Stator Part Set configuration allows the motor rotor to be directly coupled to the load. A stainless steel sleeve secures the magnets in place at the extreme speeds.
BEI Kimco Magnetics
Filed Under: Motion control • motor controls, Motors • dc