Tucson, AZ.— The Partek Operation of Parker Hannifin has recently designed and manufactured a range of compact static mixing units. The mixers were designed for use in high purity liquid blending applications commonly required in the semiconductor industry. As the name implies, these mixers have no moving parts. The overall design is very compact and provides a considerable space savings over those offered by other manufacturers.
Static mixers are used in applications where chemicals are combined into one flow stream and input into a mixing device. The internal design of the Partek SMU splits the input stream into separate flow paths, forces these partial streams back together at 45°angles to each other, breaks them apart again, and finally recombines them before exiting the body of the mixing unit. This breaking and recombining of the input stream leads to near homogeneous mixing in a very short length.
These devices are commonly used in mixing applications such as dilution of chemical mechanical polishing (CMP) slurries, de-ionized (DI) water mixing with various chemistries, and other applications where blending or dilution is required. An additional benefit of the compact SMU design is that it can be incorporated into custom manifolding (CASY’s). These manifolds can be designed with various number of input and output streams, as well as flow control devices that allow pressure or flow adjustments.
Filed Under: Materials • advanced