Cordis flow controller offers high resolution and repeatability in a closed-loop system

The Cordis flow controller utilizes an extremely fast-reacting mems technology sensor upstream from a proportional valve, with the option of a DR-2 regulator for accurate and precise pressure control in a small package. Unlike other mass flow controllers that require a 30-minute warm-up time, large differential pressures, and limited flow ranges, the Cordis requires less than one minute warm-up, its pressure drop is ≤14 in. H2O, and it features flow ranges as low as 0 to 30 sccm. Standard control options include 0.2 to 10 Vdc, 4.32 to 20 mA, and 3.3 Vdc serial.

The Cordis flow controller is adaptable to a variety of sensors that can close the loop around flow.