KLA-Tencor Corporation (Milpitas, CA) (NASDAQ: KLAC) has announced NanoPointTM, a new family of patented technologies for its 2900 Series defect inspection system. NanoPoint discovers and monitors defects at optical speed and on existing optical defect inspection equipment.
- An optical inspection system that focuses on critical patterns, as identified either by circuit designers or by known defect sites.
- The ability to reveal the need for mask re-designs within hours.
- Defectivity tracking within critical patterns.
For more information, visit http://www.kla-tencor.com/front-end-defect-inspection/29xx-series.html.
Filed Under: Rapid prototyping