Some of the processes used in the manufacture of semiconductors create stresses in the substrates as well as the deposited film. These stresses can deform, crack, delaminate, or create shorts that render the semiconductors unusable.

The Dektak XTL Stylus Profiler is a system you can use to check semiconductor quality. The latest version of the profiler extends its stylus profilometry capabilities to 200 and 300-millimeter semiconductor wafer fabs and next-generation touch panel manufacturers. The system characterizes thin film step heights, resist step heights, line edge roughness, CMP dishing and erosion, as well as roll off amount (ROA). The profiler facilitates increased accuracy and minimal operator intervention between loading and unloading samples.

The profiler has a 12-in. stage, and repeatability of 5 nanometers. It uses pneumatic passive isolation and has a fully enclosed workstation with a wide, easily accessible interlocking door. Its dual-camera architecture enables enhanced spatial awareness. It includes the Vision64® Advanced Production Interface (API) with pattern recognition for stringent QA/QC requirements.

Bruker Corp.
www.bruker.com