Elastomer O-Rings are a common choice for sealing within semiconductor equipment. However, ions can leach, leading to contamination. They can also deteriorate quickly when subjected to aggressive media and gases.

The Turcon® Variseal® is another sealing option. Turcon, a PTFE-based material, is compatible with virtually all chemical media and has superior wear resistance, and can withstand friction and extreme operating temperatures.

Because PTFE has no elasticity, the Turcon Variseal uses a spring that fits into the seal profile. However, in some semiconductor fabrication applications, metal extractables can enter the system and migrate into the wafer, causing short circuits and altering the optical and electrical properties of the semiconductor.

The Turcon® Variseal® Ultra-CleanTM solves this problem in two ways. The spring that activates the seal is fully enclosed within a Turcon case. This means there is no possibility of metal extractables entering the system.

This product also uses Turcon® MF, a compound produced from high purity PTFE grades and additives. Its smooth finish, high gloss, and low porosity reduce particle shedding. It also withstands high pressures and has a vacuum capability of 10-9 mbar x l/s in air. What’s more, these compounds have low ion extractables.

Trelleborg Sealing Solutions
www.tss.trelleborg.com/us

: Design World :

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Filed Under: Semiconductor manufacture, Seals • gaskets • O rings, Materials • advanced

 

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