Force-controlled actuator from ETEL for semiconductor applications

ETEL’s new ZAO Force-Controlled Actuator adds to its broad range of advanced motion systems. Among other applications, ZAO is suited for semiconductor pick and place, die bonding and probing machines.


Coupled with ETEL’s AccurET controller, the ZAO Force-Controlled Actuator is a state-of-the-art solution that reduces machine cost of ownership while taking up the next force control challenge.

ZAO is a 30-mm travel actuator featuring a frictionless bearing arrangement and a light moving mass, ensuring low and repeatable force application as well as low force overshoot at impact on a contact surface.

Built to take full advantage of ETEL’s sensorless Force-Control algorithm, ZAO simultaneously features a tight force control accuracy (0.2 N ±10%) and high dynamic capability (up to 20 g).

ZAO aims to address the new semiconductor back-end and electronics challenges driven by the new advanced packaging technologies and materials, specifically ensuring the integrity of fragile component or target substrates without compromising the machine throughput.

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