The model MT105-LM-HV is a compact, two axis (XZ) version of the vacuum stage with travel range choice of 30 or 50 mm. Positioning accuracy is 3 microns with repeatability of +/- 0.2 μ. It can be provided as a classic XY stage without adapter plate and can also be configured as a XYZ system. Driven by a piezo motor each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured from high stiffness aluminum. All other components and hardware are selected for ultra high vacuum use (10E-10 torr).
The Steinmeyer group