A linear motor stage providing nanometer-level performance in a large travel format has been introduced by Aerotech. The new ANT95-L crossed-roller-bearing stage uses advanced direct-drive technology to achieve resolution of 1 nm, repeatability of ±50 nm, and accuracy of ±250 nm. It is offered in 25 mm, 50 mm, 75 mm and 100 mm travel models.
New ANT95-L crossed-roller-bearing stage from Aerotech uses advanced direct-drive technology to achieve high resolution, repeatability and accuracy with 25, 50, 75 and 100 mm travel.
Processes that can benefit from the new stage include direct-writing, laser micromachining, inspection, wafer scribing, spectroscopy and optical delay lines. It has research and manufacturing applications in laser processing, photonics, medical devices, semiconductors and data storage.
The combination of nanometer accuracy and long travel allows the compact ANT95-L to solve many applications that have traditionally required complex integration of multiple technologies and components from different vendors. It offers longer travel and higher payload capability than piezo stages.
Long travel, precise nanometer incremental step size, excellent stability and repeatability make the ANT95-L ideal for high-precision laser physics and optical applications like this ultrafast 2D-IR spectroscopy experiment.
The stage’s frictionless direct-drive technology is non-cogging and non-contact, assuring zero backlash and hysteresis. Anti-creep crossed-roller bearings allow ultra-precision (1 nm) incremental moves to be accomplished repeatably and reliably, with <1 nm in-position stability. Direct-drive and crossed-roller bearings assure virtually maintenance-free operation in processes that require smooth and precise motion.
ANT95-L stages are available in X, XY, XYZ and many other combinations for single- or multi-axis positioning. Universal base mounting patterns allow use in a wide range of configurations.
Filed Under: Linear motion • slides, Motion control • motor controls, Stages • gantries