Design World

  • Home
  • Technologies
    • ELECTRONICS • ELECTRICAL
    • Fastening • joining
    • FLUID POWER
    • LINEAR MOTION
    • MOTION CONTROL
    • SENSORS
    • TEST & MEASUREMENT
    • Factory automation
    • Warehouse automation
    • DIGITAL TRANSFORMATION
  • Learn
    • Tech Toolboxes
    • Learning center
    • eBooks • Tech Tips
    • Podcasts
    • Videos
    • Webinars • general engineering
    • Webinars • Automated warehousing
    • Voices
  • LEAP Awards
  • 2025 Leadership
    • 2024 Winners
    • 2023 Winners
    • 2022 Winners
    • 2021 Winners
  • Design Guides
  • Resources
    • Subscribe
    • 3D Cad Models
      • PARTsolutions
      • TraceParts
    • Digital Issues
      • Design World
      • EE World
    • Engineering diversity
    • Trends
  • Supplier Listings
  • Advertise
  • Subscribe

MEMS Piezoresistive Low Pressure Sensing Die

By Dave Miyares | May 5, 2010

Morgan Hill, CA – All Sensors Corporation announces the introduction of a low pressure sensor die for high volume applications requiring pressure measurement to as low as a quarter inch of water full scale. This introduction of a new pressure sensor die marks the fifth major silicon pressure sensor die topology to be introduced over the past fifty years.

All-Sensors-Low-Pressure-Sensing-Die

Die Features
The MEMS Piezoresistive Low Pressure Sensing Die utilizes an open bridge configuration, measuring 2mm x 2mm square. Industry best sensitivity specifications are made possible by break though process technology in combination with innovative MEMS topology. The new die design features maximum pressure response while maintaining low package stress susceptibility. By utilizing a boss-less structure the position sensitivity is minimized (typically 0.1% inH2O/g).

History
In the 1960’s Bell Labs developed and Honeywell commercialized the first silicon pressure sensor using longitudinal and transverse strain sensitive resistors with square micromachined diaphragms. This design provided acceptable performance to as low as one psi.

In the 1970’s Motorola introduced a shear strain silicon pressure sensor with performance targeted for automotive manifold absolute pressure (MAP) applications. These sensors incorporate shear strain sensitive resistors with square micromachined diaphragms with superior performance at 15 psia.

Also, in the 1970’s several companies developed and commercialized silicon variable capacitance structures designed to detect either parallel plate changes in capacitance with pressure or changes in edge effect variable capacitance with changes in pressure. These sensors provided excellent response to pressures less than one inch of water. These sensors where either too large or too expensive for many applications.

In the 1980’s several companies, most notably Silicon Microstructures, introduced longitudinal and transverse strain sensors with enhanced silicon microstructures to provide excellent pressure sensing to as low as several inches of water. Honeywell and others have been able to use this structure in conjunction with Honeywell patent 6,023,978 to extend the range to below an inch of water full scale.

This year All Sensors has developed, introduced and will commercialize a next generation silicon pressure sensor that provides superior performance to fractions of an inch of water full scale. This sensor combines elements of features found in pressure sensors dating back to bonded strain gage sensors of the 1950’s to enhanced, state of the art, silicon micromachining of silicon on insulator (SOI) wafers.

All Sensors
www.allsensors.com

::Design World::

You Might Also Like


Filed Under: Sensors (pressure), SENSORS, TEST & MEASUREMENT, ELECTRONICS • ELECTRICAL

 

LEARNING CENTER

Design World Learning Center
“dw
EXPAND YOUR KNOWLEDGE AND STAY CONNECTED
Get the latest info on technologies, tools and strategies for Design Engineering Professionals.
Motor University

Design World Digital Edition

cover

Browse the most current issue of Design World and back issues in an easy to use high quality format. Clip, share and download with the leading design engineering magazine today.

EDABoard the Forum for Electronics

Top global problem solving EE forum covering Microcontrollers, DSP, Networking, Analog and Digital Design, RF, Power Electronics, PCB Routing and much more

EDABoard: Forum for electronics

Sponsored Content

  • Sustainability, Innovation and Safety, Central to Our Approach
  • Why off-highway is the sweet spot for AC electrification technology
  • Looking to 2025: Past Success Guides Future Achievements
  • North American Companies Seek Stronger Ties with Italian OEMs
  • Adapt and Evolve
  • Sustainable Practices for a Sustainable World
View More >>
Engineering Exchange

The Engineering Exchange is a global educational networking community for engineers.

Connect, share, and learn today »

Design World
  • About us
  • Contact
  • Manage your Design World Subscription
  • Subscribe
  • Design World Digital Network
  • Control Engineering
  • Consulting-Specifying Engineer
  • Plant Engineering
  • Engineering White Papers
  • Leap Awards

Copyright © 2025 WTWH Media LLC. All Rights Reserved. The material on this site may not be reproduced, distributed, transmitted, cached or otherwise used, except with the prior written permission of WTWH Media
Privacy Policy | Advertising | About Us

Search Design World

  • Home
  • Technologies
    • ELECTRONICS • ELECTRICAL
    • Fastening • joining
    • FLUID POWER
    • LINEAR MOTION
    • MOTION CONTROL
    • SENSORS
    • TEST & MEASUREMENT
    • Factory automation
    • Warehouse automation
    • DIGITAL TRANSFORMATION
  • Learn
    • Tech Toolboxes
    • Learning center
    • eBooks • Tech Tips
    • Podcasts
    • Videos
    • Webinars • general engineering
    • Webinars • Automated warehousing
    • Voices
  • LEAP Awards
  • 2025 Leadership
    • 2024 Winners
    • 2023 Winners
    • 2022 Winners
    • 2021 Winners
  • Design Guides
  • Resources
    • Subscribe
    • 3D Cad Models
      • PARTsolutions
      • TraceParts
    • Digital Issues
      • Design World
      • EE World
    • Engineering diversity
    • Trends
  • Supplier Listings
  • Advertise
  • Subscribe
We use cookies to personalize content and ads, to provide social media features, and to analyze our traffic. We share information about your use of our site with our social media, advertising, and analytics partners who may combine it with other information you’ve provided to them or that they’ve collected from your use of their services. You consent to our cookies if you continue to use this website.OkNoRead more