MT 105-50-LM high precision micro manipulator stage is made of high-strength anodized aluminum. The standard table offers a travel of 50 mm and positional accuracy of 1 ‚Âµm, straightness/flatness runout of +/- 1 ‚Âµm and repeatability of +/- 0.2 ‚Âµm. With a sleek, low-profile design, it has a footprint of 105 mm x 151 mm, height of 25 mm and weighs only 1 kg.
Other features include preloaded cross roller bearings, fixed stops and an incremental linear encoder with 0.1 ‚Âµm resolution. The unit can be provided as a XY stage without adapter plate, and can also be configured as a XYZ system with an optional bracket. Ultrahigh vacuum, cleanroom or non-magnetic preparation is available on request. This stage suits semiconductor metrology, biomedical, miniature robotics, and laser industry applications.
Filed Under: Semiconductor, Encoders • linear, Motion control • motor controls, Stages • gantries
Tell Us What You Think!