Developments in Semiconductor, Microscopy, and Analytical Instrumentation are driving the need for motion control systems to operate faster, more precisely, and with greater throughput. Motion requirements in vacuum and atmosphere applications, are being specified with dimensional stability at the 1nm level, along with higher duty cycle and reliability.
Nanomotion’s new SE motor family increases the range of applications served by ultrasonic standing wave motors, by achieving 500mm/sec velocity and unprecedented precision. Combined with the performance of the AB7 driver, motion platforms utilizing the SE motor are revolutionizing operational duty cycle in vacuum, absolute position stability, and overall system throughput.
The enhanced internal motor structure yields a 3X improvement in stiffness, from the existing HR motor and 2X the efficiency. The net result is:
- Increase in natural frequency, in the direction of motion
- Reduced settling time
- Higher duty cycle
- Lower power consumption (heat generation)
- Longer operating lifetime
All of these factors are proving successful in semiconductor, biomedical and instrumentation applications, in both vacuum and atmosphere environments.
The AB7 drive supports all SE motor configurations and combines the various modes of AB1A (normal AC mode), AB2 (DC mode) and AB5 (linear mode) in one driver. Additionally, the AB7 increases the motor voltage resolution by a factor of 10 over previous drives, to facilitate slow speed constant velocity.
The trends in the semiconductor industry are dictating the ability to move several kilograms, at speeds greater than 100mm/sec, settle and hold position within 1nm. Nanomotion has designed numerous motion platforms utilizing the SE motor to meet these objectives.
An XY system for UHV operation supports 28kg load, operates up to 100mm/sec and provides position stability of <1nm over 3 hours. The system is capable to stabilize position due to external factors such as thermal drift or vibrations, utilizing the DC mode in the AB7 driver.
In a vacuum application at 100mm/sec, the SE motor family will support a duty cycle above 50%, and up to 100% duty cycle at slower speeds. Comparatively speaking, the HR motor can typically support duty cycles from 26% to 8% at these velocities. Particularly important to the new generation of EBeam tools, supporting EUV applications, the extended duty cycle and position stability are a critical enabler.
Atmospheric applications in Microscopy are dictating low velocity smoothness, higher duty cycles and better tracking accuracy. The increased stiffness and efficiency of the SE motor is facilitating the ability to work on a high duty cycle with a motion platform that is precise and fast.
A comparison of the legacy HR2 motor and the SE2 motor, reflecting power and velocity shows the benefit that the SE motor brings to motion systems. The SE motor can function at a similar velocity of the HR motor, with half the power consumption. The SE motors offer double the available velocity and the ability to work at a much higher duty cycle.
Nanommotion’s SE motor and AB7 amplifier development has yielded the opportunity to increase the application base for piezo driven motion solutions. We are incorporating the motor into a variety of system designs and offering the motor/drive combination to the market place. The SE will ultimately be adapted to a family of standard stages that can benefit from the increased performance of velocity, resolution, position stability and throughput.
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