Semiconductor Testing Suite

Within the ACS Suite, the company’s integrated test systems use a variety of test hardware and overall unique measurement capability:

Model 4200-SCS Semiconductor Characterization System has I-V source-measure and pulse testing packages. The Model 4200-PIV package tests advanced semiconductor materials.

Series 2600 SourceMeter Instruments use TSP-Link and Test Script Processor (TSP) for scalable I-V channel count systems, fast parallel measurements, and complex test sequences for on-the-fly NBTI, on-wafer component characterization, and other applications. Series 2400 SourceMeter Instruments have high voltage and high current sourcing, which are unique in applications such as high power MOSFETs and display drivers.

Other instruments within the ACS test system family include: optional switching, C-meters, and pulse generators.

The systems come in basic bench-top configurations or in factory-integrated full-height rack configurations.

The ACS systems also have a Wafer Description Utility and wafer map. Users can build wafer description files with integrated test plans. Test results are seen immediately (via pass/fail metrics) from real-time updating of color-coded wafer maps during test execution.

The systems have an interactive prober controller. Using ACS software, users can control wafer movement during test development to validate test setups on actual structures and during lot disposition. This way, they can move to the area on the wafer that is causing the problem and test manually. A full range of drivers gives sound integration with a choice of semiautomatic and fully automatic probers.

Want to know more about Keithley?

Keithley Instruments, Inc.
28775 Aurora Road
Cleveland, OH 44139-1891

Tel: 800-688-9951 (toll-free)
Tel: 440-248-0400 Fax: 440-248-6168