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Upgraded Heidenhain Angle Encoder Offers High Accuracy in Vacuum Environments

By Megan Crouse | February 8, 2017

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Image credit: Heidenhain

Heidenhain announced an update for its kit angle encoder line, hardening the ECA 4000 ring so that it can survive and provide angular motion feedback. Capable of operating in a vacuum environment down to 10-7 mbar, the ECA4000V angle encoder for vacuum environments can withstand feedback within machine types appropriate for semiconductor, instrumentation, and flat panel applications. The resolution and accuracy inside the vacuum chamber have been increased for the ECA 4000V series.

In order to limit the amount of residual gas in the vacuum chamber, the epoxies and materials of the drum and scanning unit on the ECA 4000V were carefully examined and reconsidered during the design phase. During production drum and scanning units are backed to 100o C for 48 hours inside a clean production line. Vents inside the scanning units let air escape during the work process, and residual gas data is displayed in the brochure of the enclosure. Both units are then packaged inside two layers of vacuum-compatible packaging, including one nitrogen-flushed outer layer.

A tin-plated copper outer shield is provided for cabling, and plugs into the firewall feedthrough using a 15-pin vacuum-rated connector.

Heidenhain provides customized versions depending on the user’s needs, with drum diameters from 70mm inner diameter to 512mm inner diameter. Electrical interfaces such as ENDAT 2.2, Fanuc, Mitsubishi, and Panasonic are available for the scanning heads. The resolution depends on the drum size, but range from 27 to 29 bits, with drum accuracies from +/- 1.5 arc seconds to +/- 3 arc seconds.

Heidenhain Corporation produces CNC controls, linear scales, machine inspection equipment, and other precision management and control equipment.


Filed Under: Industrial automation

 

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