Microelectromechanical pressure sensors have sensitive electronic circuitry on the top surface of the chip and a diaphragm etched from the backside. Instead of applying pressure from harsh media on the top side, Merit Sensor Systems TR Series temperature-compensated pressure sensor apply the pressure to back-side, so the sensing media cannot come in contact with the active, top side of the pressure sensing die.
The temperature-compensated sensors provide the ability to measure absolute or gage pressure up to 300 psi with a total error band (combined linearity, hysteresis and repeatability) of ±2.5 % Full Scale Output (FSO) over an extended temperature range of -40 to +150°C.
Offered in three standard packaging options: a) standard face seal, b) standard with gel-filled polycarbonate pressure port and c) standard with ferrule and pins, customized packaging solutions based on customers’ preferences can also be obtained.
For more information about Merit Sensor Systems TR Series pressure sensors, click here.
Filed Under: Sensors (pressure), Sensor Tips