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Direct-drive rotary servo tables feature large aperture

By Miles Budimir | January 26, 2021

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The ACR-490UT precision rotation stage from IntelLiDrives is a low-profile rotary table with high-speed direct-drive rotary servo motor that features a large 490-mm center aperture and lightweight construction. This makes it a suitable choice for a host of applications, from precision indexing to high-speed laser machining to handling large diameter silicon wafers for semiconductor processing.

The ACR-490UT has a wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm. With a low height of 22 mm it also features resolution of 0.2 arc-sec and repeatability of 0.5 arc-sec.

rotary table

This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error. Ultra-thin series direct-drive rotary stages provide superior angular positioning and velocity control. IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

For more information, visit www.intellidrives.com.

 


Filed Under: Linear Motion Tips
Tagged With: intellidrives, stages
 

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