Applied E3‚â„¢, from Applied Materials, is a comprehensive factory automation (FA) software package for improving the productivity and reducing the costs of semiconductor, flat panel display and photovoltaic solar cell manufacturing. The package can boost process capability by more than 30%, reduce unscheduled down time, and shorten cycle time to achieve up to a 20% increase in overall equipment effectiveness. It integrates all critical equipment automation and process-control components.
Applied E3 provides a comprehensive factory automation software package for improving productivity and reducing costs of semiconductor, flat-panel display and photovoltaic solar-cell manufacturing.
Using a scalable software architecture, Applied E3 provides a powerful combination of modules. Equipment automation, data collection and logic handling simplify the construction, deployment, and maintenance of automated process control (APC) applications. Fault detection and classification (FDC) collects and analyzes equipment parameters to provide rapid feedback on process performance issues and avoid unexpected failures that decrease productivity. Run-to-run control (R2R) uses patented feedback algorithms to reduce process variability by adjusting processing parameters in real time, enabling more consistent output, higher yield and greater productivity. Equipment performance tracking (EPT) monitors every processing tool in the factory and provides visual and statistical reporting tools to identify bottlenecks and improve factory performance.
Applied Materials, Inc.
Filed Under: Factory automation, Semiconductor, Software