Precise motion is a requirement in many applications, and especially in semiconductor applications. Air bearings have a history of delivering fast, precise motion. The latest Airglide LED Wafer System is available in a wide base version for additional stiffness and support for larger payloads up to 50 kg, over travels up to 1 full meter. Combined with straightness, high accuracy, and velocity stability while scanning, the Airglide system is a maintenance-free positioning choice for stepping or scanning applications, and is well suited for laser processing of LED or semiconductor wafers.
The Airglide platform can be setup as an individual precision axis, or stacked as an XY assembly. The precise air bearing ways deliver clean and accurate positioning. The device does not need maintenance, so it can operate in applications that demand high throughput as well as those that require precise steps combined with velocity stability while scanning. Its straightness of motion integrates well with LED and semiconductor laser processing and inspection equipment.
The Airglide system delivers straightness to ±0.5 µm, compensated accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending upon the payload, it can accelerate at 5 m/s2, provide maximum velocity of 1000 mm/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 100 to 1,000 mm. The system can be operated with industry-standard servo drive control hardware, or packaged with a Dover control.
Available options include complete motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When configured in a vertical orientation for use as a Z axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling is also available for customer-enabling technology or additional axes.
Filed Under: Semiconductor, Linear motion • slides, Motion control • motor controls
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