Presenting an array of advanced automation technologies from its industry-leading portfolio, Bosch Rexroth will share its Factory of the Future insights and expertise for semiconductor manufacturing in booth 539 during SEMICON West 2019, July 9-11, at the Moscone Center in San Francisco. The company will have booth exhibits demonstrating cutting-edge automation technologies for Now, Next and Beyond, including a maglev transport system.
Visitors will discover how Bosch Rexroth is deploying innovative technology to help bring advanced Factory of the Future/Industry 4.0 concepts to life for the semiconductor industry.
Bosch Rexroth will present multiple exhibits and interactive demonstrations from its technology portfolio to help improve semiconductor manufacturing yields. These include advanced motion control platforms and high-performance linear motion systems that are currently available, plus previews of new products slated for launch in the near future, along with an opportunity to experience future cutting-edge systems such as a maglev-based wafer transport system.
Key product highlights and demonstrations in the Rexroth booth will include:
- A new magnetic levitation transport concept designed to move wafers in a vacuum, both within tools and between tools. This new platform can rotate 360 degrees with six-axis control for rotation, pitch and yaw of the wafer transport, including the ability to move up to 20 millimeters in the Z direction.
- A wafer spin and lift demonstration that shows how Rexroth integrates high-speed spindle performance and vertical lift into one complete mechatronic assembly
- The IMS Compact, the latest addition to the Rexroth family of integrated measuring systems for linear motion, combines a highly rigid Rexroth ball rail and roller rail system with a non-contact length measuring system. The IMS Compact integrates the sensor read head into the rail system runner block to save space and provide a more compact configuration for tight profiles.
- Rexroth’s state-of-the-art, user-friendly digital linear motion eTools which enable engineers to plan, design and order linear motion systems more effectively, including new configurators for runner blocks and precision steel shafts of linear bushings
Visitors will also learn how Bosch Rexroth is “taking linear technology digital“ with its Digitalization of Linear Technology demo. This interactive presentation shows how Rexroth is creating smarter linear products and digital solutions that can be used to optimize processes, predict wear sooner and provide virtual digital support throughout the entire product life cycle, from engineering and commissioning to preventive maintenance and technical service.
The Rexroth booth also features the informative I4.0 Cube, a four-sided, interactive touchscreen that showcases the company’s Connected Automation Solutions such as the IoT Gateway. Using the I4.0 Cube, visitors can explore a variety of I4.0 topics directly from the display.
In addition, Rexroth semiconductor manufacturing experts will be available to discuss solutions for key issues such as wafer transport, motion control and automation to help improve performance and yield as the semiconductor industry continues to evaluate technology for future node development.